[0061]
[Manufacturing Method]
An example of a method of manufacturing the semiconductor device 110 and the electronic device 1 including the semiconductor device 110 will be described. First, the semiconductor chip 11, the capacitor 16, and the stiffener 14 are mounted on the substrate 17. An underfill 23 is filled between the semiconductor chip 11 and the substrate 17. Next, the insulating sheet 115 is put on the capacitor 16. Then, an adhesive is applied to the attached portions 115h and 115i and cured. As a result, the inside of the housing portion 115a is sealed. An ultraviolet curable resin can be used as the adhesive. Subsequent steps may be the same as the steps for manufacturing the semiconductor device 10 and the electronic device 1 including the same.
[0062]
[Further Modification]
FIG. 9A is a sectional view showing still another modification of the electronic apparatus 1. FIG. 9B is an enlarged view of FIG. 9A. In these drawings, the electronic device 1 has a semiconductor device 210 as a modified example of the semiconductor device 10. In this figure, the same parts as those described above are designated by the same reference numerals.
[0063]
The semiconductor device 210 has an insulating sheet 215 (see FIG. 5A) as an insulating portion that covers conductor elements such as the capacitor 16 and the circuit pattern. The insulating sheet 215 is a resin molded sheet. As the material of the insulating sheet 215, engineering plastics such as polycarbonate and polyamide can be used as in the above-described insulating sheet 115.
[0064]
[Liquid Gasket] As
shown in FIG. 9B, the insulating sheet 215 has an upper wall 215b located above the capacitor 16 and an inner wall 215c located inside the capacitor 16. The upper wall 215b and the inner wall 215c form a housing portion 215a that houses a conductor element such as the capacitor 16. The insulating sheet 215 is attached by the substrate 17 by the liquid gasket E2. In detail, the attached portion 215h is formed at the lower end of the inner wall 215c, and the attached portion 215h is attached by the liquid gasket E2.
[0065]
The liquid gasket has fluidity at room temperature and is dried or homogenized after application for a certain period of time on the joint surface to form an elastic or adhesive thin layer. Examples of the material of the liquid gasket include phenol type, modified ester type, silicone type and acrylic type. By using such a liquid gasket, a high sealing property can be secured between the mounted portion 215h of the insulating sheet 215 and the substrate 17.
[0066]
The attached portion 215h formed at the lower edge of the inner wall 215c is bent with respect to the inner wall 215c and extends along the upper surface 17a of the substrate 17. The liquid gasket E2 is arranged, for example, between the upper surface 17a of the substrate 17 and the attached portion 215h. According to this, in the process of assembling the semiconductor device 210, the liquid gasket E2 is placed on the upper side of the semiconductor chip 11, which prevents the heat conductivity between the semiconductor chip 11 and the radiator 50 from being affected. You can
[0067]
[Double Insulation Sheet] As
shown in FIG. 9B, the semiconductor device 210 further includes an insulation sheet 225 as a sheet for covering the conductor elements such as the capacitor 16 and the circuit pattern. The insulating sheet 225 is arranged below the insulating sheet 215. The two sheets 215 and 225 overlap. (In the following description, the insulating sheet 215 is referred to as an upper sheet and the insulating sheet 225 is referred to as a lower sheet.) The lower sheet 225 is also attached to the substrate 17. More specifically, the lower sheet 225 also has an inner wall 225c inside the capacitor 16, and an attached portion 225h formed at the lower edge thereof is attached to the substrate 17.
[0068]
A space is formed between the lower sheet 225 and the substrate 17 to accommodate the conductor elements such as the capacitor 16 and the circuit pattern. Therefore, this space is separated from the space where the heat conductive material 31 exists by a double sheet. That is, the upper sheet 215 forms a space (inside the accommodation portion 215a) partitioned from the space where the heat conductive material 31 exists, and the lower sheet 225 is inside the accommodation portion 215a and outside the lower sheet 225. It forms a space that is partitioned from.
[0069]
The lower sheet 225 is made of a material different from that of the liquid gasket and is attached to the substrate 17. The attached portion 225h of the lower sheet 225 is bent with respect to the inner wall 225c and extends along the upper surface 17a of the substrate 17. The lower sheet 225 is attached to the substrate 17 by, for example, an adhesive tape (tape having adhesive applied on both sides) arranged between the attached portion 225h and the substrate 17. The method for attaching the lower sheet 225 to the substrate 17 is not limited to the method using an adhesive tape. For example, the attached portion 215h of the lower sheet 225 may be attached by an adhesive applied to the substrate 17.
[0070]
As described above, the heat conductive material 31 having fluidity is disposed between the lower surface 50c of the radiator 50 and the upper surface 11a of the semiconductor chip 11. Since the heat conducting material 31 has fluidity, it may come out between the lower surface 50c of the radiator 50 and the upper surface 11a of the semiconductor chip 11 and adhere to the liquid gasket E2. When it is necessary to remove the radiator 50 and the upper sheet 215 for repair of the electronic device or replacement of defective parts, the liquid gasket E2 to which the heat conductive material 31 is attached must be handled with care so as not to scatter. .. In the semiconductor device 210, the lower sheet 225 is arranged on the lower side of the upper sheet 215, and further covers the capacitor 16 in the housing portion 215a. As a result, even if the liquid gasket E2 is scattered when the radiator 50 and the upper sheet 215 are removed, the range can be limited to the region where the capacitor 16 does not exist.
[0071]
The lower sheet 225 and the upper sheet 215 may be formed of different materials. For example, the lower sheet 225 may be formed of a material having a lower rigidity than the upper sheet 215. Further, in the example of the semiconductor device 210, the lower sheet 225 is thinner than the upper sheet 215. An example of the material of the lower sheet 225 is polyethylene terephthalate, and the lower sheet 225 may have flexibility. By doing so, it is possible to suppress an increase in cost due to the lower sheet 225.
[0072]
In the example shown in FIG. 9B, the attached portion 225h of the lower sheet 225 is located below the attached portion 215h of the upper sheet 215 and partially overlaps in plan view. A part of the liquid gasket E2 is arranged above the attached portion 225h of the lower sheet 225. The relationship between the two attached portions 215h and 225h is not limited to the example shown in the figure. The attached portion 225h of the lower sheet 225 may be separated from the attached portion 215h of the upper sheet 215 in the horizontal direction.
[0073]
The semiconductor device 210 has a sealing material 33 formed of a material having a cushioning property. In the example shown in FIGS. 9A and 9B, the sealing material 33 is located above the capacitor 16 and is sandwiched between the upper sheet 215 and the lower surface 50c of the radiator 50. The sealing material 33 is arranged along the inner edge of the upper wall 215b of the upper sheet 215. The position of the sealing material 33 is not limited to the example shown in this figure, and may be located above the stiffener 14, for example.
[0074]
In the example shown in FIGS. 9A and 9B, the sheets 215 and 225 extend to the outside in the horizontal direction beyond the position of the sealing material 33 and have upper walls 215b and 225b that cover the capacitor 16 and the stiffener 14, respectively. ing. The seats 215 and 225 have outer walls 215d and 225d, which fall from the outer edges of the upper walls 215b and 225b and cover the stiffener 14, respectively. The outer walls 215d and 225d are not attached to the stiffener 14 or the substrate 17. This can reduce the work required to attach the sheets 215 and 225 to the substrate 17.
[0075]
Alternatively, the outer walls 215d and 225d may be attached to the stiffener 14 or the substrate 17. For example, the outer wall 215d of the upper sheet 215 is attached to the substrate 17 by a liquid gasket, and the outer wall 225d of the lower sheet 225 is attached to the substrate 17 or the stiffener 14 by a means different from the liquid gasket (eg, adhesive or double-sided sheet). May be.
[0076]
The structures of the sheets 215 and 225 are not limited to the examples shown in these figures. For example, the sheets 215 and 225 may have an outer wall located between the stiffener 14 and the capacitor 16, similar to the example shown in FIG. 5B. Then, the lower edge (attached portion) of the outer wall may be attached to the substrate 17. In this case, the lower edge (attached portion) of the outer wall of the upper sheet 215 is attached to the substrate 17 by the liquid gasket, and the lower edge (attached portion) of the outer wall of the lower sheet 225 is different from the liquid gasket (for example, It may be attached to the substrate 17 by an adhesive or a double-sided sheet).
[0077]
[Manufacturing Method]
An example of a method of manufacturing the semiconductor device 210 and the electronic device 1 including the semiconductor device 210 will be described. First, the semiconductor chip 11, the capacitor 16, and the stiffener 14 are mounted on the substrate 17. An underfill 23 is filled between the semiconductor chip 11 and the substrate 17. Next, the insulating sheet (lower sheet) 225 is put on the capacitor 16. Then, the attached portion 225h is attached to the substrate 17 with an adhesive sheet. Next, the liquid gasket E2 is applied on the substrate 17, and thereafter, the insulating sheet (upper sheet) 215 is covered on the lower sheet 225. Then, the attached portion 215h of the upper sheet 215 is attached to the substrate 17 with a liquid gasket. Subsequent steps may be the same as the steps for manufacturing the semiconductor device 10 and the electronic device 1 including the same.
[0078]
[Summary] In
the electronic device 1 described above, the heat conductive material 31 is disposed between the radiator 50 and the semiconductor chip 11. The heat conductive material 31 has electrical conductivity and is fluid at least during operation of the semiconductor chip 11. The seal member 33 surrounds the heat conductive material 31, and conductor elements such as a circuit pattern and electric parts are covered with an insulating portion (insulating portion 15 or insulating sheets 115, 215 and 225). According to this structure, the range in which the heat conductive material 31 spreads can be limited by the seal member 33 and the insulating portion.
[0079]
Further, in the electronic device 1, the heat conductive material 31 is arranged between the radiator 50 and the semiconductor chip 11. The heat conductive material 31 has conductivity and has fluidity at least when the semiconductor chip 11 operates. Conductor elements such as circuit patterns and electric parts are covered with an insulating portion (insulating portion 15 or insulating sheets 115, 215 and 225). The distance from at least a part of the upper surface of the insulating portion to the lower surface 50c of the radiator 50 is larger than the distance from the upper surface 11a of the semiconductor chip 11 to the lower surface 50c of the radiator 50. According to this structure, the range in which the heat conductive material spreads can be limited to a region where no conductor element such as an electric component exists. Further, the adhesion between the radiator and the semiconductor chip can be secured.
[0080]
The semiconductor devices 110, 210 have insulating sheets 115, 215, 225 that cover conductor elements such as circuit patterns and electric parts. According to the semiconductor devices 110 and 210, the range in which the heat conductive material 31 spreads can be limited to the region where the conductor element does not exist.
[0081]
The semiconductor device 10, 110, 210 has an insulating portion (insulating portion 15 or insulating sheets 115, 215, 225) that covers conductor elements such as circuit patterns and electric parts. The height of at least a part of the upper surface of the insulating portion with respect to the substrate 17 is smaller than the height of the upper surface 11a of the semiconductor chip 11 with respect to the substrate 17. According to this structure, it is possible to secure the adhesion between the radiator 50 and the semiconductor chip 11 while limiting the range where the heat conductive material 31 spreads to a region where no conductor element such as an electric component exists.
[0082]
The insulating sheets 115 and 215 have upper walls 115b and 215b located above the conductor elements and inner walls 115c and 215c located inside the upper walls 115b and 215b and extending downward from the upper walls 115b and 215b. It has accommodating portions 115a and 215a. Further, the insulating sheets 115 and 215 have attached portions 115h and 215h that are connected to the inner walls 115c and 215c and are located lower than the upper walls 115b and 215b. According to the insulating sheets 115 and 215, the range in which the heat conductive material 31 spreads can be limited to the region where the conductor element does not exist. Further, even when the difference in height between the conductor element (for example, the capacitor 16) and the semiconductor chip 11 is small, the insulating sheets 115 and 215 can be attached to the substrate relatively easily.
[0083]
An example of a method for manufacturing the semiconductor device 10, 110, 210 includes a step of covering a conductor element such as a circuit pattern or an electric component with an insulating portion (insulating portion 15 or insulating sheets 115, 215, 225). In the step of covering the conductor element with the insulating portion, the height of the upper surface of the insulating portion with respect to the substrate 17 is smaller than the height of the upper surface 11a of the semiconductor chip 11 with respect to the substrate 17. According to this method, the range in which the heat conductive material 31 spreads can be limited to a region where no conductor element such as an electric component exists. Further, the adhesion between the radiator 50 and the semiconductor chip 11 can be secured.
[0084]
The invention according to the present disclosure is not limited to the electronic device, semiconductor device, insulating sheet, and manufacturing method described above, and appropriate modifications within the scope of the invention are included in the scope of the invention.
The scope of the claims
[Claim 1]
A semiconductor chip
, a first region that is arranged below the semiconductor chip and is a region in which the semiconductor chip is mounted, and a region in which a conductor element including at least one of a circuit pattern and an electric component is provided. An
electron having a substrate having a second region, a radiator disposed
above the semiconductor chip, and a heat conductive material between the radiator and the semiconductor chip
. In the device, the
electronic device further includes a seal member surrounding the heat conductive material, and an insulating portion covering the conductor element, the
heat conductive material having conductivity, and at least the semiconductor chip. An
electronic device that has fluidity during operation .
[Claim 2]
The
electronic device according to claim 1, wherein the sealing member is located between an upper surface of the insulating portion and a lower surface of the radiator .
[Claim 3]
The electronic device according to claim 1, further comprising a stiffener attached to the substrate,
wherein the seal member is located between an upper surface of the stiffener and a lower surface of the radiator
.
[Claim 4]
The
electronic device according to claim 1, wherein the seal member is located between the conductor element and a side surface of the semiconductor chip .
[Claim 5]
The
electronic device according to claim 1, wherein the seal member is formed of a material that allows a change in thickness of the seal member in the vertical direction .
[Claim 6]
A semiconductor chip
, a first region that is arranged below the semiconductor chip and is a region in which the semiconductor chip is mounted, and a region in which a conductor element including at least one of a circuit pattern and an electric component is provided. An
electron having a substrate having a second region, a radiator disposed
above the semiconductor chip, and a heat conductive material between the radiator and the semiconductor chip
. In the device, the
electronic device further includes an insulating portion covering the conductor element, the
heat conductive material has conductivity, and has fluidity at least during operation of the semiconductor chip, and
the upper surface of the insulating portion. The
electronic device has a distance from at least a part thereof to a lower surface of the radiator larger than a distance from an upper surface of the semiconductor chip to the lower surface of the radiator .
[Claim 7]
The
electronic device according to claim 6 , wherein a height of the at least a part of the upper surface of the insulating portion with respect to the substrate is smaller than a height of the upper surface of the semiconductor chip with respect to the substrate. .
[Claim 8]
The
electronic device according to claim 6, wherein an upper surface of the electric component is covered with the insulating portion .
[Claim 9]
Further, a stiffener is attached to the
substrate, and a height of the at least part of the upper surface of the insulating portion with respect to the substrate is a height of an upper surface of the stiffener with respect to the substrate. The
electronic device according to claim 6, which is as follows .
[Claim 10]
The
electronic device according to claim 6, wherein the insulating portion is a portion in which a liquid or gel resin is cured .
[Claim 11]
The
electronic device according to claim 6, wherein the insulating portion is a sheet that covers the conductor element .
[Claim 12]
The electronic device according to claim 11, wherein the insulating portion has a first sheet and a second sheet that cover the conductor element, and the second sheet is
arranged below the first sheet
.
[Claim 13]
The
electronic device according to claim 12 , wherein a material for attaching the first sheet to the substrate and a material for attaching the second sheet to the substrate are different from each other .
[Claim 14]
The
electronic device according to claim 11, wherein the sheet is attached to the substrate by a liquid gasket .
[Claim 15]
The
electronic device according to claim 6, further comprising a sealing member that surrounds the heat conductive material .
[Claim 16]
A semiconductor chip
, a first region that is arranged below the semiconductor chip and is a region in which the semiconductor chip is mounted, and a region in which a conductor element including at least one of a circuit pattern and an electric component is provided.
A
semiconductor device comprising: a substrate having a second region; and an insulating sheet covering the conductor element .
[Claim 17]
The insulating sheet is located between the upper wall of the conductor element and the conductor element and the semiconductor chip, and is directly or indirectly attached to the substrate. and a section,
the position of the first mounted portion is lower than the upper wall
semiconductor device as claimed in claim 16.
[Claim 18]
A stiffener is attached to the substrate, the
insulating sheet is located between the upper wall of the conductor element and the conductor element and the stiffener, and is directly or indirectly attached to the substrate. 17. The semiconductor device according to claim 16,
further comprising a second attached portion attached to the upper wall, the position of the second attached portion being lower than that of the upper wall
.
[Claim 19]
The semiconductor device according to claim 16
, wherein a stiffener is attached to the substrate, and an outer edge of the insulating sheet is attached to the stiffener
.
[Claim 20]
A semiconductor chip
, a first region that is arranged below the semiconductor chip and is a region in which the semiconductor chip is mounted, and a region in which a conductor element including at least one of a circuit pattern and an electric component is provided. a substrate and a second region,
and an insulating portion covering the conductor element
has a
height relative to the at least a portion of the substrate on the upper surface of the insulating portion, the semiconductor A
semiconductor device that is smaller than a height of the upper surface of a chip with respect to the substrate .
[Claim 21]
A semiconductor chip and a substrate arranged below the semiconductor chip, and a conductor element including a first region in which the semiconductor chip is mounted and a conductor pattern including at least one of a circuit pattern and an electric component are provided. An insulating sheet for attaching a second region, which is a region provided on the substrate, to a semiconductor device included in the substrate
, the upper wall being located above the conductor element, and being located inside the upper wall. An inner wall extending downward from the upper wall, and an accommodating portion that covers the conductor element
, and an attached portion that is located at a position lower than the upper wall and that constitutes an edge portion of the accommodating portion. and it has
an insulating sheet.
[Claim 22]
A first region, which is disposed below the semiconductor chip, is a region in which the semiconductor chip is mounted, and a second region is a region in which a conductor element including at least one of a circuit pattern and an electric component is provided. preparing a substrate having bets,
a step of covering the conductive element with an insulating portion
comprises,
in the step of covering the conductor element by the insulating portion, the upper surface of the insulating portion relative to the said substrate Is smaller than the height of the upper surface of the semiconductor chip with respect to the substrate
.
[Claim 23]
The manufacturing of the semiconductor device according to claim 22 , wherein a liquid or gel resin is applied to the conductor element as an insulating material, the liquid or gel resin is cured, and the cured resin is used as the insulating portion. Method.
[Claim 24]
23. The sheet according to
claim 22 , wherein the conductor element is covered with a sheet formed of an insulating material, the sheet is directly or indirectly adhered to the substrate, and the sheet adhered to the substrate is the insulating portion. Manufacturing method of semiconductor device.
Drawing
[Figure 1A]
[Figure 1B]
[ Figure 2]
[Figure 3A]
[Figure 3B]
[Figure 3C]
[Figure 4]
[Figure 5A]
[Figure 5B]
[Figure 6]
[Figure 7]
[Figure 8]
[Figure 9A]
[Fig. 9B]